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| 序号 | 中文全称 | 简称/别称 | 英文全拼 | CAS号 |
| 1 | 正胶光刻胶剥离液 | / | / | / |
| 2 | 光刻胶稀释剂 | / | / | / |
| 3 | 清洗液 | / | / | / |
| 4 | 增粘剂 | / | Thickener | / |
| 5 | 显影液 | / | / | / |
| 6 | 蚀刻剂 | / | / | / |
| 7 | N-甲基吡咯烷酮 | NMP | 1-Methyl-2-pyrrolidinone | 872-50-4 |
| 8 | 异丙醇 | IPA | propan-2-ol/IPA | 67-63-0 |
| 9 | 丙二醇单甲醚 | PM | Proprylene glycol monomethyl ether | 107-98-2 |
| 10 | 丙二醇甲醚醋酸酯 | PGMEA | 2-Acetoxy-1-methoxypropane | 108-65-6 |
| 11 | 二乙二醇二甲醚 | DEDM | Diethylene Glycol Dimethyl Ether | 111-96-6 |
| 12 | 二乙二醇甲乙醚 | DEME | Diethylene glycol methyl ethyl ether | 1002-67-1 |
| 13 | 乙二醇单甲醚 | EM | 2-Methoxyethanol | 109-86-4 |
| 14 | 二乙二醇单甲醚 | DEME | Diethylene glycol monomethyl ether | 111-77-3 |
| 15 | 三乙二醇单甲醚 | TEM | Triethylene glycol monomethyl ether | 112-35-6 |
| 16 | 乙二醇单乙醚 | EE | 2-Ethoxyethanol | 110-80-5 |
| 17 | 二乙二醇单乙醚 | DE | Diethylene Glycol Monoethyl Ether | 111-90-0 |
| 18 | 乙二醇单丁醚 | EB | 2-Butoxyethanol | 111-76-2 |
| 19 | 二乙二醇单丁醚 | DEB | Diethylene glycol monobutyl ether | 112-34-5 |
| 20 | 二乙二醇乙醚醋酸酯 | DCAC | Diethylene glycol monoethyl ether acetate | 112-15-2 |
| 21 | 3-乙氧基丙酸乙酯 | EEP | Ethyl 3-ethoxypropionate | 763-69-9 |
| 22 | 乙二醇二甲醚 | EDM | Ethylene glycol dimethyl ether | 110-71-4 |
| 23 | 硫酸 | H2SO4 | Sulfuric acid | 7664-93-9 |
| 24 | 氨水 | NH4OH | aqueous ammonia | 1336-21-6 |
| 25 | 双氧水 | H2O2 | hydrogen peroxide | 7722-84-1 |
| 26 | 盐酸 | HCl | hydrochloric acid | 7647-01-0 |
| 27 | 硝酸 | HNO3 | Nitric acid | 7697-37-2 |
| 28 | 磷酸 | H3PO4 | Phosphoric acid | 7664-38-2 |
| 29 | 氢氟酸 | HF | Hydrofluoric acid | 7664-39-3 |
| 30 | 冰乙酸 | 醋酸、冰醋酸 | Acetic Acid | 64-19-7 |
| 31 | 氟化铵 | NH4F | Ammonium fluoride | 12125-01-8 |
| 32 | 胆碱 | 2-羟基-N,N,N-三甲基乙铵 | Choline | 62-49-7 |
| 33 | 氢氧化钾 | 苛性钾 | Potassium hydroxide | 1310-58-3 |
| 34 | 氢氧化钠 | 烧碱、火碱、苛性钠 | Sodium hydroxide | 1310-73-2 |
| 35 | 柠檬酸 | 加州 （C6H8O7） | Citric Acid | 77-92-9 |
| 36 | 甲醇 | 羟基甲烷、木醇、木精 | methanol | 67-56-1 |
| 37 | 乙醇 | 酒精、火酒 | ethanol/ethyl alcohol | 64-17-5 |
| 38 | 丙酮 | / | Propanone/Acetone | 67-64-1 |
| 39 | 醋酸丁酯 | 醋酸丁酯/乙酸正丁酯/醋酸正丁酯 | Butyl acetate | 123-86-4 |
| 40 | 乙二醇 | EG | Ethylene glycol; EG; MEG | 107-21-1 |
| 41 | 三氯氧磷 | 氧氯化磷、磷酰三氯 | phosphorus oxychloride | 10025-87-3 |
| 42 | 环己酮 | 环己烷（C6H12） | Cyclohexanone | 108-94-1 |
| 43 | 乙酸 | 醋酸、冰醋酸 | Acetic Acid | 64-19-7 |
| 44 | 六甲基二硅氮烷 | 六甲基二硅胺烷 | 1,1,1,3,3,3-Hexamethyldisilazane | 999-97-3 |
| 45 | 四甲基氢氧化銨 | 四甲基氢氧化铵 | Tetramethylammonium hydroxide | 75-59-3 |
| 46 | 氟化銨 | NH4F | Ammonium fluoride | 12125-01-8 |
